| HS Directory Tree | Description |
|---|---|
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Chapter 84; Nuclear reactors, boilers, machinery and mechanical appliances; parts thereof |
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Machines and apparatus of a kind used solely orprincipally for the manufacture of semiconductorboules or wafers, semiconductor devices,electronic integrated circuits or flat paneldisplays; machines and apparatus specified innote 9 (c )to this Chapter |
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Dry plasma etching for the manufacture of semiconductor devices or of electronic integrated circuis; 制造半导体器件或集成电路用等离子体干法刻蚀机; |
| 13-digits CIQ code | Commodity Name |
|---|---|
8486204100101 |
制造半导体器件或集成电路用等离子体干法刻蚀机(其它机床) |
8486204100102 |
制造半导体器件或集成电路用等离子体干法刻蚀机(电子行业成套设备) |
| 8-digits HS code | Commodity Example of Chinese Name | Specification |
|---|---|---|
84862041. |
刻蚀机(旧)1994年 | 制作半导体专用 |
84862041. |
干式蚀刻机 | 制作半导体专用 |



















